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Dynamic Piezoresistive Pressure Sensors动态压阻式压力传感器

Five sensor architectures cover high-frequency pressure pulsation, hot-gas measurement, isolated liquid pressure, curved-surface pressure and confined multi-point probing. The pressure port, diaphragm, thermal path and acquisition chain are selected together.五类传感器架构覆盖高频压力脉动、高温气体、隔离液体、曲面压力与狭小空间多点探测。压力接口、膜片、热路径与采集链需要整体选型。

TSL · OSM · TTSL · SSL · PSL · SOI PIEZORESISTIVE
1 kPa-100 MPaPortfolio pressure coverage产品组合压力范围
≥300 kHzPSL natural frequencyPSL 固有频率
-55-350°CPortfolio temperature range产品组合温度范围
0.05% FSBest compensated pressure accuracy最佳补偿压力精度
Compact threaded dynamic piezoresistive pressure sensor
Dynamic pressure sensor installed on a turbine casing
Why dynamic pressure matters动态压力的意义

Mean Pressure Cannot Describe a Fast Event平均压力无法描述快速事件

Combustion instability, water hammer, cavitation, aerodynamic loading and pressure-wave propagation may be short and repetitive. Dynamic pressure preserves amplitude, rise time, frequency and phase so the event can be correlated with vibration, strain and operating state.燃烧不稳定、水锤、空化、气动载荷与压力波传播往往短促且重复。动态压力保留幅值、上升时间、频率与相位,使事件能够与振动、应变和运行工况关联。

  • Transient load input瞬态荷载输入

    Distinguish the applied pressure pulse from the structure's amplified response.区分外部压力脉冲与结构放大后的响应。

  • Frequency and phase频率与相位

    Locate pulsation sources and compare pressure-wave timing across multiple points.定位脉动源,并比较多个测点的压力波到达时间。

  • Cycle severity循环严重度

    Quantify repeated pressure ranges that drive fatigue in piping, gates and casings.量化导致管道、闸门与壳体疲劳的重复压力幅。

Measurement principle测量原理

Pressure Deflects a Silicon Diaphragm and Unbalances a Bridge压力使硅膜片变形并改变桥路平衡

Piezoresistors formed on a silicon-on-insulator diaphragm change resistance with stress. A bridge converts those changes into a differential electrical output. Geometry controls pressure range and natural frequency; packaging controls media compatibility, temperature, installation volume and response time.绝缘体上硅膜片上的压阻元件随应力改变电阻,桥路把这些变化转换为差分电信号。膜片几何决定量程与固有频率,封装决定介质兼容、温度、安装体积与响应时间。

P → σ → ΔR → VPressure · diaphragm stress · resistance · bridge output压力 · 膜片应力 · 电阻变化 · 桥路输出

Dynamic Fidelity Depends on the Pressure Path动态保真度取决于压力传递路径

A recessed port, long tube or trapped cavity can form an acoustic resonator and attenuate or amplify the signal. Flush or short-port mounting is preferred for fast events. Oil isolation protects the sensing die from corrosive media but introduces a controlled response-time tradeoff.深孔、长导压管或封闭腔体可能形成声学共振,衰减或放大信号。快速事件优先采用齐平或短通道安装;充油隔离可保护敏感芯片免受腐蚀介质影响,但会带来可控的响应时间权衡。

Measurement chain:测量链: select pressure range and overpressure margin, minimize the pressure path, provide stable bridge excitation and temperature compensation, then sample above the required dynamic bandwidth with anti-alias filtering.先确定压力范围与过压余量,缩短压力通道,提供稳定桥路激励与温度补偿,再按目标动态带宽设置采样率与抗混叠滤波。
Five product families五大产品系列

Match the Package to the Medium, Frequency and Installation Space按照介质、频率与安装空间选择封装

The five families share piezoresistive measurement principles but use different pressure interfaces and protective structures.五类产品共享压阻测量原理,但采用不同的压力接口和防护结构。

TSL · THREADED / DIRECT

Threaded Leadless SensorTSL 螺纹直装系列

Compact direct-pressure construction for high-frequency pulses and hot measurement points. Minimum diameter reaches 1.9 mm and available ranges cover 0.35-21 MPa.紧凑直压结构,适合高频脉冲与高温测点。最小外径 1.9 mm,可选范围覆盖 0.35-21 MPa。

>100 kHz-55-350°CM3 / M5 / M6<2 g
OSM · OIL-ISOLATED

Isolated High-Pressure SensorOSM 充油隔离系列

A 316L or titanium isolation diaphragm and stable silicone-oil transfer path protect the sensing die in corrosive liquid, subsea and high-pressure service.316L 或钛合金隔离膜片与稳定硅油传压路径,保护敏感芯片用于腐蚀液体、深海和高压环境。

5-100 MPa≤1 ms-55-150°C0.1-0.25% FS
TTSL · PRESSURE + PT1000

Integrated Pressure and TemperatureTTSL 温压一体系列

One compact point provides pressure and PT1000 temperature, supporting thermal compensation and correlation in hot transient measurements.单个紧凑测点同时输出压力与 PT1000 温度,用于高温瞬态测量中的热补偿和关联分析。

>100 kHz0.35-21 MPa±0.1°C PT10000.05% FS
SSL · ULTRA-THIN PATCH

Flexible Surface PressureSSL 超薄贴片系列

A flexible polyimide substrate follows curved or space-constrained surfaces where a conventional threaded body would disturb the test article.柔性聚酰亚胺基底适应曲面与狭小空间,减少传统螺纹壳体对被测对象的扰动。

1-100 kPa≤0.7 mm≤0.3 g0.25% FS
PSL · HIGH-FREQUENCY PROBE

Miniature Probe SensorPSL 高频探针系列

A probe as small as 1.7 mm enters confined flow paths and supports 2D or 3D arrays for pressure-field and wave-propagation measurement.最小 1.7 mm 探针可进入狭小流道,并支持二维或三维阵列,用于压力场与波传播测量。

≥300 kHz1-50 MPa-55-350°C≤0.5 g
SELECTION LOGIC选型逻辑

Do Not Select by Range Alone不能只按量程选型

Confirm medium compatibility, static bias plus dynamic amplitude, pressure-path geometry, thermal gradient, natural frequency, installation torque and cable routing before model finalization.最终定型前,需要同时确认介质兼容、静态偏置与动态幅值、压力通道几何、温度梯度、固有频率、安装扭矩和电缆走线。

Specification matrix规格矩阵

Portfolio Comparison产品组合对比

Values are series boundaries. Exact range, thread, output, compensation and connector are selected in the model configuration.表中为系列边界,具体量程、螺纹、输出、补偿与接口在型号配置中确定。

Series系列Pressure range压力范围Dynamic response动态响应Temperature温度Key installation feature关键安装特征
TSL0.35-21 MPa>100 kHz natural frequency固有频率-55 to 350°CThreaded direct-pressure body, minimum 1.9 mm diameter螺纹直压,最小外径 1.9 mm
OSM5-100 MPa≤1 ms response time响应时间-55 to 150°C316L / titanium isolation diaphragm, direct or flange mounting316L / 钛隔离膜片,直装或法兰安装
TTSL0.35-21 MPa>100 kHz natural frequency固有频率-55 to 350°CDual pressure and PT1000 temperature output压力与 PT1000 温度双输出
SSL1-100 kPaSeries-specific按具体型号-40 to 85°CFlexible surface attachment, bend radius ≥5 mm柔性表贴,弯曲半径 ≥5 mm
PSL1-50 MPa≥300 kHz natural frequency固有频率-55 to 350°C1.7 mm minimum probe, 2D / 3D arrays最小 1.7 mm 探针,二维 / 三维阵列

Natural frequency is not the same as a guaranteed flat measurement bandwidth. The usable band depends on the sensor transfer function, installation cavity, tubing, thermal protection and acquisition filter.固有频率不等同于保证平坦的测量带宽。可用频带还取决于传感器传递函数、安装腔体、导压管、隔热结构与采集滤波。

Application scenes应用场景

Pressure Is Both a Load and a Process State压力既是结构荷载,也是过程工况

Dynamic pressure links the process that excites a structure to the vibration and strain response that follows.动态压力把激励结构的过程源,与随后的振动和应变响应连接起来。

AERO-ENGINE

Combustion and Turbine燃烧与涡轮

Combustion-chamber pulsation, cylinder and exhaust pressure, turbine flow-field and blade-load studies.燃烧室脉动、缸压与排气压力、涡轮流场及叶片载荷研究。

WIND TUNNEL

Aerodynamic Pressure Field气动压力场

Model-surface pressure distribution, intake dynamics and multi-point pressure-wave comparison.模型表面压力分布、进气道动态与多点压力波对比。

DAM / HYDRAULIC

Water Hammer and Cavitation水锤与空化

Penstock, gate, spillway and hydraulic-servo transients synchronized with structural vibration and strain.压力管道、闸门、泄洪与液压伺服瞬态,并与结构振动和应变同步。

ENERGY / INDUSTRY

Harsh-Media Pressure苛刻介质压力

Downhole, subsea, injection molding, high-pressure liquid and confined industrial process measurement.井下、深海、注塑、高压液体与狭小工业过程测量。

Measurement method测量方法

Preserve the Pressure Wave from Port to File从压力接口到数据文件完整保留压力波

The most common dynamic-pressure errors are caused by unsuitable ports, thermal shock, insufficient static-range allowance, ground loops and an acquisition band that does not match the event.动态压力常见误差来自不合适的压力接口、热冲击、静态量程余量不足、接地回路及采集频带与事件不匹配。

01 · DEFINE

Pressure State压力状态

  • Static bias + dynamic peak静态偏置 + 动态峰值
  • Medium and temperature介质与温度
02 · PORT

Mechanical Interface机械接口

  • Flush or short path齐平或短通道
  • Torque and sealing扭矩与密封
03 · THERMAL

Temperature Path热路径

  • Compensation and shielding补偿与隔热
  • Avoid thermal shock bias抑制热冲击漂移
04 · ACQUIRE

Bridge Signal桥路信号

  • Stable excitation稳定激励
  • Differential low-noise input低噪声差分输入
05 · VERIFY

Dynamic Chain动态链路

  • Zero and sensitivity零点与灵敏度
  • Bandwidth and phase带宽与相位

Define the pressure path before choosing the sensor先定义压力传递路径,再选择传感器

Provide the medium, static and dynamic pressure, temperature, target bandwidth, port geometry, installation envelope, channel layout and cable route. Rasber will configure the sensor family and acquisition chain.提供介质、静态与动态压力、温度、目标带宽、接口几何、安装空间、通道布置与电缆路径,瑞茨柏将配置传感器系列和采集链。

Configure Dynamic Pressure配置动态压力测量